The magnetron discharge pulse excitation

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High power impulse magnetron sputtering discharge

J. T. Gudmundsson, N. Brenning, Daniel Lundin and Ulf Helmersson, High power impulse magnetron sputtering discharge, 2012, Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, (30), 030801. http://dx.doi.org/10.1116/1.3691832 Copyright: American Vacuum Society, This article may be downloaded for personal use only. Any other use requires prior permission of the author and the ...

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ژورنال

عنوان ژورنال: Electronics and Communications

سال: 2017

ISSN: 2312-1807,1811-4512

DOI: 10.20535/2312-1807.2017.22.3.105448